Resonant MEMS Mass Sensors for Measurement of Microdroplet Evaporation Kidong Park Namjung Kim Dallas T. Morisette N. R. Aluru Rashid Bashir Published in Journal of Microelectromechanical Systems
Micro-Masonry of MEMS Sensors and Actuators Yong Zhang Hohyun Keum Kidong Park Rashid Bashir Seok Kim Published in Journal of Microelectromechanical Systems
