Published in Applied Physics Letters
In this letter, we present the microfabrication and application of arrays of silicon cantilever beams as microresonator sensors with nanoscale thickness to detect the mass of individual virus particles. The dimensions of the fabricated cantilever beams were in the range of 4–5 μm in length, 1–2 μm in width and 20–30 nm in thickness. The virus parti...
Published in Applied Physics Letters
We have investigated the statistics of low-frequency noise in the tunneling current of ultrathin oxides (2.5–4nm) in metal-oxide-semiconductor capacitors as a function of the applied voltage stress. The statistical analysis includes (i) non-Gaussianity (nG), which is a measure of the degree of temporal correlation in the noise, and (ii) ratio of in...
Published in Applied Physics Letters
Published in Applied Physics Letters
Published in Applied Physics Letters
Published in Applied Physics Letters
Published in Applied Physics Letters
